Title Characterization and Analysis of Diode-String ESD Protection in 28nm CMOS by VFTLP
Authors Li, Cheng
Wang, Chenkun
Chen, Qi
Zhang, Feilong
Lu, Fei
Shi, Xuejie
Yang, Yongsheng
Li, Hongwei
Chen, Guang
Li, Tony
Feng, Danniel
Tang, Tianshen
Cheng, Yuhua
Wang, Albert
Affiliation Univ Calif Riverside, Dept Elect & Comp Engn, Riverside, CA 92521 USA.
Semicond Mfg Int Shanghai Corp, Shanghai, Peoples R China.
Peking Univ, Shanghai Res Inst Microelect, Shanghai, Peoples R China.
Peking Univ, Sch Elect Engn & Comp Sci, Beijing, Peoples R China.
Keywords DESIGN
Issue Date 2017
Publisher 2017 IEEE 24TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA)
Citation 2017 IEEE 24TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA). 2017.
Abstract This paper reports characterization and analysis of diode string electrostatic discharging (ESD) protection structures fabricated in a foundry 28nm CMOS technology. Comprehensive measurements were conducted using very-fast transmission line pulse (VFTLP) tester for Charged Device Model (CDM) ESD protection. The analysis results reveal the I-V insights critical to practical ESD protection designs.
URI http://hdl.handle.net/20.500.11897/511895
ISSN 1946-1550
Indexed CPCI-S(ISTP)
Appears in Collections: 上海微电子研究院
信息科学技术学院

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