Title Experimental Study on Quasi-Ballistic Transport in Silicon Nanowire Transistors and the Impact of Self-Heating Effects
Authors Wang, Runsheng
Zhuge, Jing
Liu, Changze
Huang, Ru
Kim, D.W.
Park, Donggun
Wang, Yangyuan
Affiliation Peking Univ, Inst Microelect, Beijing 100871, Peoples R China.
Issue Date 2008
Citation IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST..
Abstract The ballistic efficiency and self-heating effects in gate-all-around silicon nanowire transistors (SNWTs) are experimentally investigated in this paper. A modified experimental extraction method for SNWTs is proposed, which takes into account the impact of source contact resistance. The highest ballistic efficiency is observed in sub-40nm SNWTs at room temperature, demonstrating their intrinsic potential for near-ballistic transport. However, it is experimentally found that, even if the SNWT is fabricated on bulk-Si substrate, the self-heating effect is comparable or even a little bit worse than SOI devices due to the I-D nature of nanowire and increased phonon-boundary scattering- in GAA structure. Considering heat transport and heating corrections at the drain side, the Lundstrom model is modified, and the impacts of self-heating on quasi-ballistic SNWTs are discussed as well.
URI http://hdl.handle.net/20.500.11897/153508
DOI 10.1109/IEDM.2008.4796806
Indexed EI
CPCI-S(ISTP)
Appears in Collections: 信息科学技术学院

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