Title High Anti-Reflection Large-Scale Cup-Shaped Nano-Pillar Arrays via Thin Film Anodic Aluminum Oxide Replication
Authors Sun, Tangyou
Shui, Furong
Yang, Xiancui
Zhou, Zhiping
Wan, Rongqiao
Liu, Yun
Qian, Cheng
Xu, Zhimou
Li, Haiou
Guo, Wenjing
Affiliation Guilin Univ Elect Technol, Guangxi Key Lab Precis Nav Technol & Applicat, Guilin 541004, Peoples R China
Peking Univ, Sch Elect Engn & Comp Sci, State Key Lab Adv Opt Commun Syst & Networks, Beijing 100091, Peoples R China
PerkinElmer Management Shanghai Co Ltd, Shanghai 201203, Peoples R China
Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China
Keywords LIGHT-EMITTING-DIODES
SILICON SOLAR-CELLS
PERFORMANCE
NANOSTRUCTURES
EFFICIENCY
TEMPLATE
COATINGS
SURFACE
GROWTH
GLASS
Issue Date Jun-2022
Publisher NANOMATERIALS
Abstract Surface anti-reflection (AR) with nanometer-scaled texture has shown excellent light trapping performance involving optical devices. In this work, we developed a simple and lithography-free structure replication process to obtain large scale surface cup-shaped nano-pillar (CSNP) arrays for the first time. A method of depositing was used for pattern transfer based on PMMA pre-coated through-hole anodic aluminum oxide (AAO) thin film (similar to 500 nm), and eventually, the uniformity of the transferred nanostructures was guaranteed. From the spectrum (250 nm similar to 2000 nm) dependent measurements, the CSNP nanostructured Si showed excellent AR performance when compared with that of the single-polished Si. Moreover, the CSNP was found to be polarization insensitive and less dependent on incidence angles (<= 80 degrees) over the whole spectrum. To further prove the excellent antireflective properties of the CSNP structure, thin film solar cell models were built and studied. The maximum value of J(ph) for CSNP solar cells shows obvious improvement comparing with that of the cylinder, cone and parabola structured ones. Specifically, in comparison with the optimized Si3N4 thin film solar cell, an increment of 54.64% has been achieved for the CSNP thin film solar cell.
URI http://hdl.handle.net/20.500.11897/647739
DOI 10.3390/nano12111875
Indexed SCI(E)
Appears in Collections: 信息科学技术学院
区域光纤通信网与新型光通信系统国家重点实验室

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