Title Polarization-Driven-Orientation Selective Growth of Single-Crystalline III-Nitride Semiconductors on Arbitrary Substrates
Authors Liu, Danshuo
Hu, Lin
Yang, Xuelin
Zhang, Zhihong
Yu, Haodong
Zheng, Fawei
Feng, Yuxia
Wei, Jiaqi
Cai, Zidong
Chen, Zhenghao
Ma, Cheng
Xu, Fujun
Wang, Xinqiang
Ge, Weikun
Liu, Kaihui
Huang, Bing
Shen, Bo
Affiliation Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Minist Educ,Nanooptoelect Frontier Ctr, Beijing 100871, Peoples R China
Beijing Computat Sci Res Ctr, Beijing 100193, Peoples R China
Beijing Inst Technol, Sch Phys, Ctr Quantum Phys, Key Lab Adv Optoelect Quantum Architecture & Meas, Beijing 100081, Peoples R China
Peking Univ, Yangtze Delta Inst Optoelect, Nantong 226010, Peoples R China
Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Peoples R China
Lanzhou Univ, Key Lab Magnetism & Magnet Mat MOE, Lanzhou 730000, Peoples R China
Beijing Univ Technol, Coll Microelect, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China
Beijing Normal Univ, Dept Phys, Beijing 100875, Peoples R China
Keywords LAYER
Issue Date Feb-2022
Publisher ADVANCED FUNCTIONAL MATERIALS
Abstract III-nitride semiconductor films are usually achieved by epitaxial growth on single-crystalline substrates (sapphire, silicon (Si), and silicon carbide). It is important to grow these films on non-epitaxial substrates of interest such as polycrystalline substrates for exploring novel applications in electronics and optoelectronics. However, single-crystalline III-nitride films with uniform orientation on non-epitaxial substrates have not yet been realized, due to the lack of crystallographic orientation of the substrates. Here, this work proposes a strategy of polarization-driven-orientation selective growth (OSG) and demonstrate that single-crystalline gallium nitride (GaN) can in principle be achieved on any substrates. Taking polycrystalline diamond and amorphous-silicon dioxide/Si substrates as typical examples, the OSG is demonstrated by utilizing a composed buffer layer consisting of graphene and polycrystalline physical vapor deposited (PVD) aluminium nitride (AlN). The polarization of the PVD AlN can effectively tune the strength of interfacial orbital coupling between AlN nuclei and graphene at different rotation angles, as confirmed by atom-scale first-principles calculations, and align the AlN nuclei to form a uniform orientation. This consequently leads to continuous single-crystalline GaN films. The ability to grow single-crystalline III-nitrides onto any desired substrates would create unprecedented opportunities for developing novel electronic and optoelectronic devices.
URI http://hdl.handle.net/20.500.11897/637978
ISSN 1616-301X
DOI 10.1002/adfm.202113211
Indexed SCI(E)
Appears in Collections: 物理学院
人工微结构和介观物理国家重点实验室

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