| Title | DEFECT DETECTIONS OF POLYMERS MATERIALS BASED ON BI-MATERIAL MICROCANTILEVER FPA AT 3.1THZ |
| Authors | Miao, Jiahao Xu, Jia Liu, Yi Tian, Yuan Yu, Xiaomei |
| Affiliation | Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China |
| Issue Date | 2021 |
| Publisher | 2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) |
| Abstract | This paper reports defect detections of polymers based on bi-material microcantilever focal plane array (FPA) at 3.1 terahertz (THz). The FPA was realized by integrating the metamaterial absorbers (MAs) into a bi-material microcantilever, which thermomechanical sensitivity was measured to be 3.86 mu m/K. An imaging system was then established by a parabolic minor group for THz beam collimation and expansion, which can decrease the THz energy loss by about 44% compared with traditional lenses. The proposed system together with the fabricated FPA realizes defect detections of different polymers at room temperature with a resolution of 1 mm. |
| URI | http://hdl.handle.net/20.500.11897/628501 |
| ISBN | 978-0-7381-2562-6 |
| ISSN | 2167-0013 |
| DOI | 10.1109/Transducers50396.2021.9495723 |
| Indexed | EI CPCI-S(ISTP) |
| Appears in Collections: | 信息科学技术学院 |
