Title Three Subband Occupation of the Two-Dimensional Electron Gas in Ultrathin Barrier AlN/GaN Heterostructures
Authors Yang, Liuyun
Wang, Xinqiang
Wang, Tao
Wang, Jingyue
Zhang, Wenjie
Quach, Patrick
Wang, Ping
Liu, Fang
Li, Duo
Chen, Ling
Liu, Shangfeng
Wei, Jiaqi
Yang, Xuelin
Xu, Fujun
Tang, Ning
Tan, Wei
Zhang, Jian
Ge, Weikun
Wu, Xiaosong
Zhang, Chi
Shen, Bo
Affiliation Peking Univ, State Key Lab Mesoscop Phys, Sch Phys, Beijing 100871, Peoples R China
Peking Univ, Frontiers Sci Ctr Nanooptoelect, Sch Phys, Beijing 100871, Peoples R China
Peking Univ, Collaborat Innovat Ctr Quantum Matter, Sch Phys, Beijing 100871, Peoples R China
Peking Univ, Sch Phys, Electron Microscopy Lab, Beijing 100871, Peoples R China
China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Chengdu 610299, Peoples R China
Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Chengdu 611731, Peoples R China
Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct SKLSM, POB 912, Beijing 100083, Peoples R China
Univ Chinese Acad Sci, Chinese Acad Sci CAS, Ctr Excellence Topol Quantum Computat, Beijing 100190, Peoples R China
Keywords INTERSUBBAND TRANSITION
ALGAN/GAN HEMTS
QUANTUM-WELL
MOBILITY
OSCILLATIONS
SCATTERING
PHASE
Issue Date Sep-2020
Publisher ADVANCED FUNCTIONAL MATERIALS
Abstract Ultrathin barrier AlN/GaN heterostructure with record low sheet resistance of 82 omega sq(-1)is achieved by molecular beam epitaxy, where Shubnikov-de Haas oscillations (SdHOs) and quantum Hall effect (QHE) of two-dimensional electron gas (2DEG) are observed. The fast Fourier transform analysis of the SdHOs demonstrates a three-subband occupation in the triangle quantum well for the first time, with the electron density ofn(1)=2.2x10(13) cm(-2),n(2)= 2.3x10(12)cm(-2), andn(3)=8.8x10(11)cm(-2), respectively, and the corresponding energy of 265, 28, and 11 meV below Fermi level. The three-subband QHE with a superposed feature is also demonstrated for the first time in AlN/GaN heterostructure, with large filling factors at high electron densities. By analyzing the first subband as the dominant part of the superposed QHE, the transport physics of a special magneto-intersubband scattering is revealed. These results contribute to a better understanding of the quantum physics for 2DEG, leading to a versatile functionality for AlN/GaN devices.
URI http://hdl.handle.net/20.500.11897/607623
ISSN 1616-301X
DOI 10.1002/adfm.202004450
Indexed SCI(E)
Appears in Collections: 物理学院
人工微结构和介观物理国家重点实验室

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