Title | High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization (SILEC) |
Authors | Yang, Yuancheng Zhang, Baotong Dong, Xiaoqiao Li, Xiaokang Sun, Shuang Cai, Qifeng Bi, Ran Xu, Xiaoyan Li, Ming Huang, Ru |
Affiliation | Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China |
Issue Date | 28-Jun-2020 |
Publisher | SCIENCE CHINA-INFORMATION SCIENCES |
URI | http://hdl.handle.net/20.500.11897/590257 |
ISSN | 1674-733X |
DOI | 10.1007/s11432-019-2700-1 |
Indexed | SCI(E) |
Appears in Collections: | 信息科学技术学院 |