Title High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization (SILEC)
Authors Yang, Yuancheng
Zhang, Baotong
Dong, Xiaoqiao
Li, Xiaokang
Sun, Shuang
Cai, Qifeng
Bi, Ran
Xu, Xiaoyan
Li, Ming
Huang, Ru
Affiliation Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
Issue Date 28-Jun-2020
Publisher SCIENCE CHINA-INFORMATION SCIENCES
URI http://hdl.handle.net/20.500.11897/590257
ISSN 1674-733X
DOI 10.1007/s11432-019-2700-1
Indexed SCI(E)
Appears in Collections: 信息科学技术学院

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