Title Influence of intrinsic or extrinsic doping on lattice locations of carbon in semi-insulating GaN
Authors Xu, Yue
Yang, Xuelin
Zhang, Peng
Cao, Xingzhong
Chen, Yao
Guo, Shiping
Wu, Shan
Zhang, Jie
Feng, Yuxia
Xu, Fujun
Wang, Xinqiang
Ge, Weikun
Shen, Bo
Affiliation Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
Chinese Acad Sci, Inst High Energy Phys, Key Lab Nucl Anal Tech, Beijing 100049, Peoples R China
Adv Microfabricat Equipment Inc, Shanghai 201201, Peoples R China
Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China
Issue Date 2019
Publisher APPLIED PHYSICS EXPRESS
Abstract We demonstrate that different doping approaches can significantly influence the lattice locations of carbon (C) in GaN grown by MOCVD. For intrinsically doped GaN with TMGa as the C source, an annealing induced switching process of C atoms from Ga sites to N sites is observed, revealing the existence of substitutional C atoms on both Ga and N sites. While for extrinsically doped GaN with propane as the C precursor, C atoms incorporate almost on N sites. From the viewpoint of growth dynamics, we propose a mechanism for C incorporation into different lattice locations. (C) 2019 The Japan Society of Applied Physics
URI http://hdl.handle.net/20.500.11897/547949
ISSN 1882-0778
DOI 10.7567/1882-0786/ab1c19
Indexed SCI(E)
EI
Appears in Collections: 物理学院
人工微结构和介观物理国家重点实验室

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