Title Growth and physical properties of BiFeO3 thin films directly on Si substrate
Authors Yao, Xiaokang
Wang, Can
Tian, Shilu
Zhou, Yong
Li, Xiaomei
Ge, Chen
Guo, Er-jia
He, Meng
Bai, Xuedong
Gao, Peng
Yang, Guozhen
Jin, Kuijuan
Affiliation Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
Univ Chinese Acad Sci, Beijing 100049, Peoples R China
Songshan Lake Mat Lab, Dongguan 523808, Guangdong, Peoples R China
Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
Peking Univ, Int Ctr Quantum Mat & Electron Microscopy Lab, Sch Phys, Beijing 100871, Peoples R China
Keywords X-ray diffraction
Thin film
Laser-molecular beam epitaxy
Multiferroic BiFeO3
Semiconductor Si
Issue Date 2019
Publisher JOURNAL OF CRYSTAL GROWTH
Abstract Multiferroic BiFeO3 thin films have been widely studied for their intriguing fundamental physics and exotic functional properties. Integration of the BiFeO3 thin films with semiconductor Si is crucial for the practical development of novel electronic and photosensitive devices. Here, we report the fabrication and physical properties of BiFeO3 thin films grown directly on bare Si substrate by laser-molecular beam epitaxy. It was found that a predeposition process performed at room temperature and high vacuum conditions is effective and necessary for obtaining the pure-phase BiFeO3 thin films. X-ray diffraction measurements indicate that the obtained BiFeO3 thin films are in a single-phase polycrystalline state and show improved crystallinity with increasing thickness, and a transmission electronic microscopy image illustrates an interface layer around 3 nm in thickness existing between the BiFeO3 thin films and Si substrate. Electrical measurements show that the BiFeO3 thin films have good ferroelectricity and low leakage current. Moreover, optical properties investigated by spectroscopic ellipsometry demonstrate that the direct band gap of the thin films increases with decreasing thickness.
URI http://hdl.handle.net/20.500.11897/545149
ISSN 0022-0248
DOI 10.1016/j.jcrysgro.2019.06.017
Indexed SCI(E)
EI
Appears in Collections: 量子材料科学中心

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