Title High-Mobility Two-Dimensional Electron Gas at InGaN/InN Heterointerface Grown by Molecular Beam Epitaxy
Authors Wang, Tao
Wang, Xinqiang
Chen, Zhaoying
Sun, Xiaoxiao
Wang, Ping
Zheng, Xiantong
Rong, Xin
Yang, Liuyun
Guo, Weiwei
Wang, Ding
Cheng, Jianpeng
Lin, Xi
Li, Peng
Li, Jun
He, Xin
Zhang, Qiang
Li, Mo
Zhang, Jian
Yang, Xuelin
Xu, Fujun
Ge, Weikun
Zhang, Xixiang
Shen, Bo
Affiliation Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China.
King Abdullah Univ Sci & Technol, Div Phys Sci & Engn, Thuwal 239556900, Saudi Arabia.
Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China.
China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Chengdu 610200, Sichuan, Peoples R China.
Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China.
Zhang, XX (reprint author), King Abdullah Univ Sci & Technol, Div Phys Sci & Engn, Thuwal 239556900, Saudi Arabia.
Wang, XQ
Shen, B (reprint author), Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China.
Keywords 2D electron gas
InGaN/InN
molecular beam epitaxy
PIEZOELECTRIC POLARIZATION
ALGAN/GAN HETEROSTRUCTURES
INN
HEMTS
HETEROJUNCTION
SEMICONDUCTORS
GRAPHENE
DEVICES
STATE
Issue Date 2018
Publisher ADVANCED SCIENCE
Citation ADVANCED SCIENCE. 2018, 5(9).
Abstract Due to the intrinsic spontaneous and piezoelectric polarization effect, III-nitride semiconductor heterostructures are promising candidates for generating 2D electron gas (2DEG) system. Among III-nitrides, InN is predicted to be the best conductive-channel material because its electrons have the smallest effective mass and it exhibits large band offsets at the heterointerface of GaN/InN or AlN/InN. Until now, that prediction has remained theoretical, due to a giant gap between the optimal growth windows of InN and GaN, and the difficult epitaxial growth of InN in general. The experimental realization of 2DEG at an InGaN/InN heterointerface grown by molecular beam epitaxy is reported here. The directly probed electron mobility and the sheet electron density of the InGaN/InN heterostructure are determined by Hall-effect measurements at room temperature to be 2.29 x 10(3) cm(2) V-1 s(-1) and 2.14 x 10(13) cm(-2), respectively, including contribution from the InN bottom layer. The Shubnikov-de Haas results at 3 K confirm that the 2DEG has an electron density of 3.30 x 10(12) cm(-2) and a quantum mobility of 1.48 x 10(3) cm(2) V-1 s(-1). The experimental observations of 2DEG at the InGaN/InN heterointerface have paved the way for fabricating higher-speed transistors based on an InN channel.
URI http://hdl.handle.net/20.500.11897/517585
ISSN 2198-3844
DOI 10.1002/advs.201800844
Indexed SCI(E)
EI
PubMed
Medline
Appears in Collections: 物理学院
人工微结构和介观物理国家重点实验室

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