Title Direct synthesis of high-quality nitrogen-doped graphene via ion implantation
Authors Zhao, Yunbiao
Wang, Xu
Fu, Engang
Han, Dong
Wang, Peipei
Wu, Zaoming
Chen, Yi
Chen, Yuhan
Zhao, Ziqiang
Affiliation Peking Univ, Sch Phys, State Key Lab Nucl Phys & Technol, Beijing 100871, Peoples R China.
China Acad Engn Phys, Inst Mat, Jiangyou 621908, Peoples R China.
Keywords RAMAN-SPECTROSCOPY
SILICON-CARBIDE
ELECTRICAL-PROPERTIES
MONOLAYER GRAPHENE
SIC MICROSPHERES
CARBON
GROWTH
DEFECTS
SUBSTRATE
TRANSPORT
Issue Date 2018
Publisher CARBON
Citation CARBON. 2018, 139, 732-739.
Abstract Synthesis of nitrogen-doped graphene (NG) is of great importance and conventional synthesis methods still remain huge challenges due to uncontrollable nitrogen doping content and complicated experimental procedure. In this study, a promising approach for synthesis of high-quality NG via nitrogen ion implantation compatible with the current microelectronic industry is reported. By nitrogen ion implantation into a newly designed multilayered substrate (Ni/Cu/amorphous-SiC/SiO2/Si), high-quality NG can be directly grown on the metal surface after a one-step rapid thermal processing. A detailed growth model of NG based on the design of multilayered substrate, the low energy ion implantation and the formation of Cu-Ni alloy with composition gradient is established. The ion implantation approach could open up a new pathway for doping graphene, as well as shed light on versatile and potential applications of doping other 2D materials. (C) 2018 Elsevier Ltd. All rights reserved.
URI http://hdl.handle.net/20.500.11897/516905
ISSN 0008-6223
DOI 10.1016/j.carbon.2018.06.063
Indexed SCI(E)
EI
Appears in Collections: 物理学院
核物理与核技术国家重点实验室

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