| Title | ANEMOMETER WITH THREE-DIMENSIONAL DIRECTIONALITY FOR DETECTION OF VERY LOW SPEED AIR FLOW AND ACOUSTIC PARTICLE VELOCITY DETECTING CAPABILITY |
| Authors | Luo, Zhongliang Li, Zhe Gao, Chengchen Hao, Yilong Jin, Yufeng |
| Affiliation | Peking Univ, Shenzhen Grad Sch, Shenzhen, Peoples R China. Peking Univ, Inst Microelect, Beijing, Peoples R China. Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing, Peoples R China. Innovat Ctr Micronano Elect & Integrated Syst, Beijing, Peoples R China. Collaborat Innovat Ctr Micro Nano Fabricat Device, Beijing, Peoples R China. Peking Univ, Inst Microelect, Beijing, Peoples R China. Gao, CC (reprint author), Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing, Peoples R China. Gao, CC (reprint author), Collaborat Innovat Ctr Micro Nano Fabricat Device, Beijing, Peoples R China. |
| Keywords | Anemometer five-wire very low speed acoustic particle velocity three-dimensional |
| Issue Date | 2017 |
| Publisher | 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) |
| Citation | 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS). 2017, 1029-1032. |
| Abstract | We develop a micro-fabricated anemometer with three-dimensional directionality based on thermal Thomas flowmeter principle, which is capable of measuring very low airflow speed. This sensor has three layers of resistive platinum beams. Experiments on speed lower than 200 mm/s are conducted, showing acceptable repeatability and obvious directionality. The speed of airflow is tested with the volumetric flow rate. To further explore its potential, we expose it to acoustic plane waves of frequency range from 200 Hz to 1.38 kHz in a standing wave tube, showing consistent planar directivity of figure of eight. Velocity sensitivity at 1 kHz and 120 dBC measures 4.4 mV.s/m, with relative sensitivity of 27.0 dB. |
| URI | http://hdl.handle.net/20.500.11897/502189 |
| DOI | 10.1109/TRANSDUCERS.2017.7994227 |
| Indexed | EI CPCI-S(ISTP) |
| Appears in Collections: | 深圳研究生院待认领 信息科学技术学院 |
