Title Atomic layer deposition for nanomaterial synthesis and functionalization in energy technology
Authors Meng, Xiangbo
Wang, Xinwei
Geng, Dongsheng
Ozgit-Akgun, Cagla
Schneider, Nathanaelle
Elam, Jeffrey W.
Affiliation Univ Arkansas, Dept Mech Engn, Fayetteville, AR 72701 USA.
Peking Univ, Shenzhen Grad Sch, Sch Adv Mat, Shenzhen 518055, Peoples R China.
Univ Sci & Technol Beijing, Sch Math & Phys, Ctr Green Innovat, Beijing 100083, Peoples R China.
ASELSAN Inc, Microelect Guidance & Electroopt Business Sect, TR-06750 Ankara, Turkey.
EDF CNRS Chim ParisTech, UMR 7174, IRDEP, F-78401 Chatou, France.
Inst Photovolta Ile France IPVF, F-92160 Antony, France.
Argonne Natl Lab, Div Energy Syst, Argonne, IL 60439 USA.
Keywords LIGHT-EMITTING-DIODES
SENSITIZED SOLAR-CELLS
LITHIUM-ION BATTERIES
THIN-FILM ENCAPSULATION
TEMPERATURE FUEL-CELLS
CORE-SHELL NANOWIRES
OF-THE-ART
BUFFER LAYER
ZINC-OXIDE
ULTRAVIOLET ELECTROLUMINESCENCE
Issue Date 2017
Publisher MATERIALS HORIZONS
Citation MATERIALS HORIZONS.2017,4(2),133-154.
Abstract Atomic layer deposition (ALD) has been receiving more and more research attention in the past few decades, ascribed to its unrivaled capabilities in controlling material growth with atomic precision, manipulating novel nanostructures, tuning material composition, offering multiple choices in terms of crystallinity, and producing conformal and uniform film coverage, as well as its suitability for thermally sensitive substrates. These unique characteristics have made ALD an irreplaceable tool and research approach for numerous applications. In this review, we summarize the recent advances of ALD in several important areas including rechargeable secondary batteries, fuel cells, solar cells, and optoelectronics. With this review, we expect to exhibit ALD's versatile potential in providing unique solutions to various technical challenges and also hope to further expand ALD's applications in emerging areas.
URI http://hdl.handle.net/20.500.11897/476290
ISSN 2051-6347
DOI 10.1039/c6mh00521g
Indexed SCI(E)
Appears in Collections: 新材料学院

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