Title Controlled Gas Molecules Doping of Monolayer MoS2 via Atomic-Layer-Deposited Al2O3 Films
Authors Li, Yuanzheng
Li, Xinshu
Chen, Heyu
Shi, Jia
Shang, Qiuyu
Zhang, Shuai
Qui, Xiaohui
Liu, Zheng
Zhang, Qing
Xu, Haiyang
Liu, Weizhen
Liu, Xinfeng
Liu, Yichun
Affiliation Northeast Normal Univ, Minist Educ, Ctr Adv Optoelect Funct Mat Res, Changchun 130024, Jilin, Peoples R China.
Northeast Normal Univ, Minist Educ, Key Lab UV Emitting Mat & Technol, Changchun 130024, Jilin, Peoples R China.
Natl Ctr Nanosci & Technol, CAS Ctr Excellence Nanosci, Div Nanophoton, CAS Key Lab Standardizat & Measurement Nanotechno, Beijing 100190, Peoples R China.
Peking Univ, Dept Mat Sci & Engn, Coll Engn, Beijing 100871, Peoples R China.
Northeast Normal Univ, Natl Demonstrat Ctr Expt Phys Educ, Changchun 130024, Jilin, Peoples R China.
Nanyang Technol Univ, Sch Mat Sci & Engn, Ctr Programmable Mat, Singapore 639798, Singapore.
Northeast Normal Univ, Minist Educ, Ctr Adv Optoelect Funct Mat Res, Changchun 130024, Jilin, Peoples R China.
Xu, HY
Liu, WZ (reprint author), Northeast Normal Univ, Minist Educ, Key Lab UV Emitting Mat & Technol, Changchun 130024, Jilin, Peoples R China.
Liu, XF (reprint author), Natl Ctr Nanosci & Technol, CAS Ctr Excellence Nanosci, Div Nanophoton, CAS Key Lab Standardizat & Measurement Nanotechno, Beijing 100190, Peoples R China.
Xu, HY
Liu, WZ (reprint author), Northeast Normal Univ, Natl Demonstrat Ctr Expt Phys Educ, Changchun 130024, Jilin, Peoples R China.
Keywords monolayer MoS2
aomic layer deposition (ALD)
gas molecules doping
Al2O3
stability
MOLYBDENUM-DISULFIDE
2-DIMENSIONAL SEMICONDUCTORS
PHOTOLUMINESCENCE
ENHANCEMENT
TRANSITION
EXCITONS
TRANSISTORS
DEFECTS
TRIONS
GROWTH
Issue Date 2017
Publisher ACS APPLIED MATERIALS & INTERFACES
Citation ACS APPLIED MATERIALS & INTERFACES.2017,9(33),27402-27408.
Abstract MoS2 as atomically thin semiconductor is highly sensitive to ambient atmosphere (e.g., oxygen, moisture, etc.) in optical and electrical properties. Here we report a controlled gas molecules doping of monolayer MoS2 via atomic-layer-deposited Al2O3 films. The deposited Al2O3 films, in the shape of nanospheres, can effectively control the contact areas between ambient atmosphere and MoS2 that allows precise modulation of gas molecules doping. By analyzing photoluminescence (PL) emission spectra of MoS2 with different thickness of Al2O3, the doped carrier concentration is estimated at similar to 2.7 X 10(13) cm(-2) based on the mass action model. Moreover, time-dependent PL measurements indicate an incremental stability of single layer MoS2 as the thicknesses of Al2O3 capping layer increase. Effective control of gas molecules doping in monolayer MoS2 provides us a valuable insight into the applications of MoS2 based optical and electrical devices.
URI http://hdl.handle.net/20.500.11897/471388
ISSN 1944-8244
DOI 10.1021/acsami.7b08893
Indexed SCI(E)
Appears in Collections: 工学院

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