Title The effect of current compliance on the resistive switching behaviors in TiN/ZrO2/Pt memory device
Authors Sun, Bing
Liu, Lifeng
Xu, Nuo
Gao, Bin
Wang, Yi.
Han, Dedong
Liu, Xiaoyan
Han, Ruqi
Kang, Jinfeng
Affiliation Institute of Microelectronics, Peking University, Beijing 100871, China
Issue Date 2009
Publisher Japanese Journal of Applied Physics
Citation Japanese Journal of Applied Physics.2009,48(4 PART 2).
Abstract In this paper, TiN/ZrO2/Pt sandwiched resistive switching memory devices were fabricated. The effect of set current compliance on the resistive switching behaviors in TiN/ZrO2/Pt memory device was studied. The different dependence of low resistance state on the set current compliance were observed under the different magnitudes of set current compliance: 1) the average read current was linearly dependent on the set current compliance in the magnitude of low set current compliance; 2) then a weaker dependence of the average read current on the set current compliance was observed in the magnitude of higher set current compliance; 3) when the current compliance is high enough, the unipolar resistive switching behaviors instead of the bipolar resistive switching was shown. A physical model based on oxygen vacancy conducting filamentary paths is proposed to explain the effect of set current compliance on the resistive switching behaviors in TiN/ZrO2/Pt memory device. ? 2009 The Japan Society of Applied Physics.
URI http://hdl.handle.net/20.500.11897/460941
ISSN 00214922
DOI 10.1143/JJAP.48.04C061
Indexed EI
Appears in Collections: 信息科学技术学院

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