Title A FLEXIBLE AND WEARABLE GENERATOR WITH FLUOROCARBON PLASMA INDUCED WRINKLE STRUCTURE
Authors Cheng, Xiaoliang
Chen, Xuexian
Meng, Bo
Han, Mengdi
Shi, Mayue
Chen, Haotian
Song, Yu
Zhang, Haixia
Affiliation Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China.
Keywords TRIBOELECTRIC NANOGENERATORS
ENERGY
Issue Date 2016
Publisher 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Citation 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2016,1181-1184.
Abstract This work presents a flexible and wearable energy harvester for harvesting muscle motion energy. A novel single-step fluorocarbon plasma induced wrinkle structure is employed as the friction layer to increase its performance by enlarging the contact area and introducing material modification at the same time. Under bending or pressing, this device could produce an alternating current. Additionally, by adjusting the spin-coating speed, this wrinkle morphology and the thickness of PDMS (polydimethylsiloxane) film could be controlled. Therefore, through the optimizing of this parameter, 225 V peak voltage and 375 mu A maximum current is achieved under finger typing. Moreover, this device is successfully mounted on an adult's arm to scavenge the mechanical energy during his motion. Due to its well flexibility, simple manufacturing process, and high output performance, the generator has much potential for powering up wearable electronics or e-skin.
URI http://hdl.handle.net/20.500.11897/457047
ISSN 1084-6999
Indexed CPCI-S(ISTP)
Appears in Collections: 信息科学技术学院

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