| Title | Investigation of reliability of MEMS gyroscopes under different shock conditions |
| Authors | Zhang, Pan He, Chunhua Zhang, Jimeng Zhao, Qiancheng Yang, Zhenchuan Zhang, Dacheng Yan, Guizhen |
| Affiliation | Peking Univ, Shenzhen Grad Sch, Beijing 100871, Peoples R China. Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China. |
| Keywords | shock MEMS gyroscope simulation damping |
| Issue Date | 2015 |
| Publisher | IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| Citation | IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS).2015,441-444. |
| Abstract | In this work, the shock survivability of MEMS gyroscopes under different shock conditions are investigated. Both shock experiments and numerical simulations are carried out to study the influences of the shock load level, duration and damping conditions. The simulation results are consistent with the experimental results. The results indicate that the selections of natural frequencies and air-damping conditions are all critical to reach a desired shock resistances of the gyroscopes. |
| URI | http://hdl.handle.net/20.500.11897/450209 |
| Indexed | CPCI-S(ISTP) |
| Appears in Collections: | 深圳研究生院待认领 信息科学技术学院 |
