| Title | A Microfluidic-Based Fabry Perot Gas Sensor |
| Authors | Tao, Jin Zhang, Qiankun Xiao, Yunfeng Li, Xiaoying Yao, Pei Pang, Wei Zhang, Hao Duan, Xuexin Zhang, Daihua Liu, Jing |
| Affiliation | Tianjin Univ, Sch Precis Instruments & Opto Elect Engn, State Key Lab Precis Measurement Technol & Instru, Tianjin 300072, Peoples R China. Peking Univ, Sch Phys, State Key Lab Mesoscop Phys, Beijing 100044, Peoples R China. Tianjin Univ, Sch Precis Instrument & Opto Elect Engn, Key Lab Optoelectron Informat Technol, Tianjin 300072, Peoples R China. Tianjin Univ, Sch Mat Sci & Engn, Tianjin 300072, Peoples R China. |
| Keywords | micro gas sensor MEMS micro Fabry-Perot cavity optical fiber microfluidic channel SURFACE-PLASMON RESONANCE REFRACTIVE-INDEX CHROMATOGRAPHY DETECTION INTERFEROMETRIC SENSORS DETECTOR CHEMIRESISTOR MICROCHANNEL PERFORMANCE SELECTIVITY GRAPHENE |
| Issue Date | 2016 |
| Publisher | MICROMACHINES |
| Citation | MICROMACHINES.2016,7,(3). |
| Abstract | We developed a micro-gas detector based on a Fabry-Perot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through a hole drilled at the center of the groove into the microfluidic FP cavity, forming an FP cavity. The light is partially reflected at the optical fiber endface and the silicon surface, respectively, generating an interference spectrum. The detection is implemented by monitoring the interference spectrum shift caused by the refractive index change of the FP cavity when a gas analyte passes through. This detection mechanism (1) enables detecting a wide range of analytes, including both organic and inorganic (inertia) gases, significantly enhancing its versatility; (2) does not disturb any gas flow so that it can collaborate with other detectors to improve sensing performances; and (3) ensures a fast sensing response for potential applications in gas chromatography systems. In the experiments, we used various gases to demonstrate the sensing capability of the detector and observed drastically different sensor responses. The estimated sensitivity of the detector is 812.5 nm/refractive index unit (RIU) with a detection limit of 1.2 x 10(-6) RIU assuming a 1 pm minimum resolvable wavelength shift. |
| URI | http://hdl.handle.net/20.500.11897/437656 |
| ISSN | 2072-666X |
| DOI | 10.3390/mi7030036 |
| Indexed | SCI(E) EI |
| Appears in Collections: | 物理学院 人工微结构和介观物理国家重点实验室 |
