| Title | A novel scale factor calibration method for a MEMS gyroscope based on virtual coriolis force |
| Authors | Zhang, Jimeng He, Chunhua Liu, Yuxian Liu, Dachuan Zhao, Qiancheng Yang, Zhenchuan Yan, Guizhen |
| Affiliation | Shenzhen Graduate School, Peking University, China National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, China |
| Issue Date | 2015 |
| Publisher | 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 |
| Citation | 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015.Xi'an, China,2015/7/1. |
| Abstract | This paper presents a novel scale factor calibration method for a MEMS vibratory gyroscope based on virtual Coriolis force. Frequency and amplitude programmable voltage signals generated by the system can be used to emulate the Coriolis force induced by external angular rate signals. The system contributes to the development procedure of control system for gyroscope and provides a scale factor calibration method for the digital control system of a gyroscope. The experiment results show the digital system can acquire the frequency response of gyroscope and detect the frequency response of reference virtual rate signal effectively. ? 2015 IEEE. |
| URI | http://hdl.handle.net/20.500.11897/423752 |
| ISSN | 9781467366953 |
| DOI | 10.1109/NEMS.2015.7147373 |
| Indexed | EI |
| Appears in Collections: | 深圳研究生院待认领 信息科学技术学院 |
