| Title | Investigation of reliability of MEMS gyroscopes under different shock conditions |
| Authors | Zhang, Pan He, Chunhua Zhang, Jimeng Zhao, Qiancheng Yang, Zhenchuan Zhang, Dacheng Yan, Guizhen |
| Affiliation | Shenzhen Graduate School, Peking University, Institute of Microelectronics, Beijing, China National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, China |
| Issue Date | 2015 |
| Publisher | 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 |
| Citation | 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015.Xi'an, China,2015/7/1. |
| Abstract | In this work, the shock survivability of MEMS gyroscopes under different shock conditions are investigated. Both shock experiments and numerical simulations are carried out to study the influences of the shock load level, duration and damping conditions. The simulation results are consistent with the experimental results. The results indicate that the selections of natural frequencies and air-damping conditions are all critical to reach a desired shock resistances of the gyroscopes. ? 2015 IEEE. |
| URI | http://hdl.handle.net/20.500.11897/423717 |
| ISSN | 9781467366953 |
| DOI | 10.1109/NEMS.2015.7147463 |
| Indexed | EI |
| Appears in Collections: | 信息科学技术学院 |
