| Title | Design and analysis of a piezoresistive accelerometer with the film-island structure |
| Authors | Yang, Xing-Min Wei, Zhang Wei, Zhao |
| Affiliation | National Key Laboratory on Electron Testing, North University of China, Taiyuan, Shanxi, China Institute of Microelectronic, Peking University, Bejing, China |
| Issue Date | 2012 |
| Citation | 2011 International Conference on Manufacturing Science and Technology, ICMST 2011.Singapore, Singapore,383-390(2237-2241). |
| Abstract | In this paper, we propose a piezoresistive accelerometer with the film-island structure, whose working range is up to 100, 000g. Compared with the beam-island structure, the film-island structure has some advantages. With the film squeezed, the damping and the stiffness increase whereas the transverse sensitivity decreases. The fragmentation can be avoided in the overload situation. The damping characteristics, which are crucial for this accelerometer design, are theoretically analyzed in depth, and are verified by FEM simulation with ANSYS. |
| URI | http://hdl.handle.net/20.500.11897/410880 |
| DOI | 10.4028/www.scientific.net/AMR.383-390.2237 |
| Indexed | EI |
| Appears in Collections: | 信息科学技术学院 |
