| Title | 2-dimensional analysis of surface electric field profile of planar junction with single-step field-plate termination structure |
| Authors | He, Jin Zhang, Xing Huang, Ru Wang, Yang-Yuan |
| Affiliation | Inst. of Microelectron., Peking Univ., Beijing 100871, China |
| Issue Date | 2001 |
| Publisher | pan tao ti hsueh paochinese journal of semiconductors |
| Citation | Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors.2001,22,(7),915-918. |
| Abstract | Based on Poisson Equation, an analytical model is proposed for the 2-dimensional surface electric field profile of the planar junction with a single-step filed plate structure. The dependence on the doping concentration, field plate thickness and length of the surface electric field profile were analyzed. The calculated breakdown voltages show good agreement with the previous results. The presented analytical model is especial useful in design of the filed plate termination of the power devices and SPIC. |
| URI | http://hdl.handle.net/20.500.11897/408324 |
| ISSN | 02534177 |
| Indexed | EI |
| Appears in Collections: | 信息科学技术学院 |
