Title Analytic potential model for asymmetricunderlap gate-all-around MOSFET
Authors Wang, Shaodi
Guo, Xinjie
Zhang, Lining
Zhang, Chenfei
Liu, Zhiwei
Wang, Guozeng
Zhang, Yang
Wu, Wen
Zhao, Xiaojin
Wang, Wenping
Cao, Yu
Ye, Yun
Wang, Ruonan
Ma, Yong
He, Jin
Affiliation Key Laboratory of Integrated Microsystems, School of Computer and Information Engineering, Peking University, Shenzhen 518055, China
Peking University, Shenzhen SOC Key Laboratory, PKU HKUST Shenzhen Institute, Shenzhen 518057, China
Issue Date 2011
Citation Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2011 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2011.Boston, MA, United states,2(776-779).
Abstract An analytic potential model for undoped cylindrical gate-all-around (GAA) MOSFET with asymmetric gate underlap is developed in this paper. This model is derived by solving the Poisson's equation with the parabolic potential approximation, channel length transformation and conformai mapping. The analytic body center potential solution is presented. Compared with TCAD simulations, the proposed model shows good agreements, with different dimensions of the structure and varied bias conditions. The model here is appropriate for predicting the effect of gate misalignment or asymmetric gate underlap in GAA MOSFETs' design.
URI http://hdl.handle.net/20.500.11897/328646
Indexed EI
Appears in Collections: 深圳研究生院待认领

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