| Title | A 16 �� 16 micro mirror array for optical switches |
| Authors | Chen, Qinghua Wu, Wengang Wang, Ziqian Yan, Guizhen Hao, Yilong |
| Affiliation | National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China |
| Issue Date | 2008 |
| Publisher | pan tao ti hsueh paochinese journal of semiconductors |
| Citation | Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors.2008,29,(8),1496-1503. |
| Abstract | This paper reports on the design, fabrication, and performance of a high-reflectivity large-rotation mirror array for MEMS (micro-electro-mechanical system) 16 ?? 16 optical switches. The mirror in the array can enlarge its rotation angles up to 90?? and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electromechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a surface and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The reflectivity of the mirror is measured to be 93.1%-96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2.1 dB using OptiFocusTM collimating lensed fibers. Moreover, only about ??0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3 mm. |
| URI | http://hdl.handle.net/20.500.11897/294133 |
| ISSN | 02534177 |
| Indexed | EI |
| Appears in Collections: | 信息科学技术学院 |
