Title | DESIGN AND SIMULATION FOR TRI-AXIAL PIEZORESISTIVE MEMS ACCELEROMETER |
Authors | Liu, Meng Zhang, Wei Hao, Yilong |
Affiliation | Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Inst Microelect, Beijing 100871, Peoples R China. |
Keywords | Piezoresistive accelerometer FEA Silicon High-g force SILICON |
Issue Date | 2012 |
Citation | MICRO-NANO TECHNOLOGY XIII.503(312-317). |
Abstract | This paper presents analytical models for tri-axial accelerometer based on one seismic mass and eight beams. The model makes it possible to better understand and to predict the behavior of the accelerometer. The accelerometer discussed in this paper was designed to measure high g-forces in every single axis. We use finite element mechanics analysis and design for optimization of the device structure. FEA software ANSYS was used to simulate the behavior of the accelerometer when it was subjected to static high-g forces. The analytical results of simulation and theoretical demonstrate that the accelerometer we designed is feasible. |
URI | http://hdl.handle.net/20.500.11897/292864 |
ISSN | 1013-9826 |
DOI | 10.4028/www.scientific.net/KEM.503.312 |
Indexed | EI CPCI-S(ISTP) |
Appears in Collections: | 信息科学技术学院 |