Title Analysis of Electrostatic Crosstalk in 3D Vertical NAND Charge Trapping Memory with Junction less GAA Nanowire FET
Authors Wang, Yijiao
Liu, Xiaoyan
Yang, Yunxiang
Qin, Jieyu
Du, Gang
Kang, Jinfeng
Affiliation Peking Univ, Inst Microelect, Beijing 100871, Peoples R China.
Issue Date 2012
Citation 2012 IEEE 11TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT-2012)..
Abstract The electrostatic crosstalk in the 3D vertical CTM (Charge Trapping Memory) NAND NVM is investigated with various typical operation conditions. The junctionless FET of GAA (Gate-All-Around) nanowire with O/N/O (Oxide/Nitride/Oxide) dielectrics is simulated as the storage cell. The electrostatic properties of two neighbor cells of a NAND string are evaluated under typical conditions corresponding to the program operation. The results are help to design and optimize the new structures of 3D CTM NAND Flask
URI http://hdl.handle.net/20.500.11897/292706
Indexed CPCI-S(ISTP)
Appears in Collections: 信息科学技术学院

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