| Title | A Sub 0.8 Degree per Hour Mode-matching MEMS Vibratory Gyroscope with Closed Loop Control for the Sense Mode |
| Authors | He, Chunhua Zhao, Qiancheng Liu, Dachuan Yang, Zhenchuan Yan, Guizhen |
| Affiliation | Peking Univ, Inst Microelect, Beijing 100871, Peoples R China. |
| Keywords | MEMS vibratory gyroscope mode-matching closed loop control nonlinearity |
| Issue Date | 2013 |
| Citation | MICRO-NANO TECHNOLOGY XIV, PTS 1-4.562-565(260-264). |
| Abstract | A detailed analysis about the nonlinearity of a mode-matching MEMS vibratory gyroscope is presented in this paper, then closed loop control for the sense mode is adopted to improved the performances. Experimental results figure out that the mode-matching gyroscope with closed loop controlled sense mode achieves a scale factor of 65mV/deg/s with nonlinearity of 0.05% and asymmetry of 0.1%, and a bias instability of 0.77deg/h, while they are 60mV/deg/s, 1%, 4.6% and 9.8deg/h in the open loop controlled sense mode system, respectively. These performances can be improved by more than one order of magnitude in the closed loop control system. |
| URI | http://hdl.handle.net/20.500.11897/292604 |
| ISSN | 1013-9826 |
| DOI | 10.4028/www.scientific.net/KEM.562-565.260 |
| Indexed | EI CPCI-S(ISTP) |
| Appears in Collections: | 信息科学技术学院 |
