| Title | A Novel Integrated Micro-scale Closed Synthetic-jet-like Flow Field as Gas Lubrication in MEMS Devices |
| Authors | Ding, Fei Yu, Wenxuan Yu, Tingting Ni, Chao Tang, Ruyan Wu, Wengang |
| Affiliation | Peking Univ, Inst Microelect, Natl Key Lab Micro Nano Fabricat Technol, Beijing 100871, Peoples R China. |
| Keywords | micro flow field friction MEMS synthetic jet WEAR |
| Issue Date | 2009 |
| Citation | 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2.. |
| Abstract | The friction and wear problems have remarkably affected the reliability of Micro-Electro-Mechanical System (MEMS) devices. We present, for the first time, a novel integrated micro-scale closed synthetic-jet-like flow field, which provides a velocity-orientation-constant flow in an enclosure, being available as gas lubrication of the motion parts of MEMS devices to solve the friction problem. Based on a specific pyramid structure we work out, this novel method is applied to a practical rotary electrostatic side drive motor, and is theoretically proved to be effective. |
| URI | http://hdl.handle.net/20.500.11897/153272 |
| DOI | 10.1109/NEMS.2009.5068644 |
| Indexed | EI CPCI-S(ISTP) |
| Appears in Collections: | 信息科学技术学院 |
