Title Characteristics and mechanism of conduction/set process in TiN/ZnO/Pt resistance switching random-access memories
Authors Xu, Nuo
Liu, Lifeng
Sun, Xiao
Liu, Xiaoyan
Han, Dedong
Wang, Yi
Han, Ruqi
Kang, Jinfeng
Yu, Bin
Affiliation Peking Univ, Inst Microelect, Beijing 100871, Peoples R China.
Keywords COMPLEX
Issue Date 2008
Publisher 应用物理学快报
Citation APPLIED PHYSICS LETTERS.2008,92,(23).
Abstract The characteristics and mechanism of conduction/set process in TiN/ZnO/Pt-based resistance random access memory devices with stable and reproducible nanosecond bipolar switching behavior were studied. The dependencies of memory behavior on cell area, operating temperature, and frequency indicate that the conduction mechanism in low-resistance states is due to electrons hopping through filament paths. We also identify that the set process is essentially equivalent to a soft dielectric breakdown associated with a polarization effect caused by the migration of space charges under a low electric field stress. The generation/recovery of oxygen vacancies and nonlattice oxygen ions play a critical role in resistance switching. (C) 2008 American Institute of Physics.
URI http://hdl.handle.net/20.500.11897/152923
ISSN 0003-6951
DOI 10.1063/1.2945278
Indexed SCI(E)
EI
Appears in Collections: 信息科学技术学院

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