| Title | Fabrication and Characterization of a Parylene-Based Three-Dimensional Microelectrode Array for Use in Retinal Prosthesis |
| Authors | Wang, Renxin Huang, Xianju Liu, Guangfeng Wang, Wei Dong, Fangtian Li, Zhihong |
| Affiliation | Peking Univ, Inst Microelect, Beijing 100871, Peoples R China. Chinese Acad Med Sci, Peking Union Med Coll, Peking Union Med Coll Hosp, Dept Ophthalmol, Beijing 100730, Peoples R China. |
| Keywords | Electrical stimulation Parylene retinal prosthesis 3-D microelectrode array (MEA) DENSITY NEURAL STIMULATION DEEP BRAIN-STIMULATION RETINITIS-PIGMENTOSA ELECTRODES BLIND |
| Issue Date | 2010 |
| Publisher | journal of microelectromechanical systems |
| Citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS.2010,19,(2),367-374. |
| Abstract | A novel Parylene-based shape-transferring technique was developed to fabricate 3-D microelectrodes, which fulfilled the requirements of the high-density microelectrode array (MEA) used in retinal prosthesis. A process combining anisotropic and isotropic etching was utilized to form the 3-D silicon-tip array whose shape was transferred to the Parylene C film as a flexible and biocompatible substrate. Platinum was chosen as the electrode material owing to its high charge delivery capacity and chemical inertness in the physiological environment. An aluminum-photoresist dual-layer lift-off process was employed for platinum patterning on the substrate with high tips. To avoid the cracking problem existing in the platinum-Parylene C structure, a gold intermediate layer was introduced to retard the tendency. To test the superiority of the present 3-D flexible MEA compared with the planar one, electrical properties of MEAs were characterized both in vitro and in vivo. The experimental results showed that the impedance of the 3-D electrode was about 72.7% of the planar one at 1 kHz with the same footprint in vitro, and 71.5% in vivo. The preliminary surgical experiment validated the feasibility of the 3-D MEA in retinal prosthesis. [2009-0112] |
| URI | http://hdl.handle.net/20.500.11897/152724 |
| ISSN | 1057-7157 |
| DOI | 10.1109/JMEMS.2009.2039773 |
| Indexed | SCI(E) EI |
| Appears in Collections: | 信息科学技术学院 |
