| Title | A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode |
| Authors | He, Chunhua Zhao, Qiancheng Huang, Qinwen Liu, Dachuan Yang, Zhenchuan Zhang, Dacheng Yan, Guizhen |
| Affiliation | Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China. Minist Ind & Informat Technol, Sci & Technol Reliabil Phys & Applicat Elect Comp, Guangzhou 510610, Guangdong, Peoples R China. |
| Keywords | MEMS gyroscope mode-matching fuzzy control neural network control robust control reliability DESIGN PERFORMANCE |
| Issue Date | 2015 |
| Publisher | ieee sensors journal |
| Citation | IEEE SENSORS JOURNAL.2015,15,(4),2069-2077. |
| Abstract | This paper presents a method to accomplish automatic and real-time mode-matching control for a microelectromechanical systems vibratory gyroscope based on improved fuzzy algorithm and neural network algorithm. Meanwhile, robust control for the sense mode is applied to enhance the reliability of the closed-loop system. Experimental results demonstrate that it only needs similar to 8 s to achieve mode-matching intelligently in the improved fuzzy control system. In addition, a mismatching error <0.32 Hz is achieved over the temperature range from -40 degrees C to 80 degrees C in the neural network real-time control system, which is improved by more than one order of magnitude compared with that of once-time control system. In addition, the temperature coefficient of the zero bias is also improved to be 0.5 degrees/h/degrees C in the real-time mode-matching control system. Experimental results of phase margin, gain margin, and sensitivity margin indicate that the closed-loop system is stable and robust enough over the full temperature range. Moreover, the bandwidth and bias instability of the mode-matching gyroscope with closed-loop controlled sense mode are >85 Hz and <5 degrees/h, respectively. |
| URI | http://hdl.handle.net/20.500.11897/151897 |
| ISSN | 1530-437X |
| DOI | 10.1109/JSEN.2014.2371456 |
| Indexed | SCI(E) EI |
| Appears in Collections: | 信息科学技术学院 |
