Browsing by Author Zhou, Rongchun
Showing results 1 to 3 of 3
Issue Date | Title | Author(s) |
2004 | 3D simulation of profile evolution in silicon DRIE | Zhou, Rongchun; Zhang, Haixia; Hao, Yilong; Wang, Yangyuan |
2006 | Modeling and simulation of the lag effect in a deep reactive ion etching process | Tan, Yiyong; Zhou, Rongchun; Zhang, Haixia; Lu, Guizhang; Li, Zhihong |
2003 | Simulation of profile evolution in etching-polymerization alternation in drie of silicon with SF6/C4F8 | Zhou, Rongchun; Zhang, Haixia; Hao, Yilong; Zhang, Dacheng; Wang, Yangyuan |