Browsing by Author Zhang, Shibin
Showing results 1 to 5 of 5
Issue Date | Title | Author(s) |
2013 | Fabrication of Large-Scale Suspended Graphene Clamp-Clamp Beam by FIB Cutting | Zhang, Shibin; Wan, Xia; Xu, Yang; Chen, Jing |
18-Dec-2023 | High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film | Lu, Tongxin; Fang, Xiaoli; Zhang, Shibin; Yuan, Ye; Ji, Yanda; Zhang, Hongmeng; Yang, Anli; Yin, Hengyi; Zheng, Pengcheng; Zhang, Liping; Wu, Jinbo; Li, Tai; Luo, Wei; You, Tiangui; Ou, Xin; Wang, Xinqiang |
18-Dec-2023 | High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film | Lu, Tongxin; Fang, Xiaoli; Zhang, Shibin; Yuan, Ye; Ji, Yanda; Zhang, Hongmeng; Yang, Anli; Yin, Hengyi; Zheng, Pengcheng; Zhang, Liping; Wu, Jinbo; Li, Tai; Luo, Wei; You, Tiangui; Ou, Xin; Wang, Xinqiang |
2014 | Inductively coupled plasma etching of bulk tungsten for MEMS applications | Song, Lu; Li, Nannan; Zhang, Shibin; Luo, Jin; Hu, Jia; Zhang, Yiming; Chen, Shuhui; Chen, Jing |
2012 | Non-planar surface bonding with spray-coated SU-8 as adhesive layer | Li, Nannan; He, Shuwei; Zhao, Qiancheng; Zhang, Shibin; Chen, Jing |