Browsing by Author Zhang, Nancy
Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
2018 | Study of downstream CF4contained plasma process impact on chamber condition | Fu, Yali; Ma, Shawming; Wang, Yi; Wang, Ken; Jiao, Mingjie; Zhang, Nancy; Vaniapura, Vijay; Phan-Vu, Hai-Au; Elliston, Bob |
2018 | Study of Plug Etch back process matching on faraday shielded ICP and traditional CCP plasma ETCH chambers | Fu, Yali; Ma, Shawming; Wang, Yi; Xiao, Jammy; Kim, M.H.; Zhang, Nancy; Jiao, Mingjie; Wang, Frank; Lee, Tammy |